Piezoelectric thin/thick film driven microcantilever for bio-molecule detection

Title
Piezoelectric thin/thick film driven microcantilever for bio-molecule detection
Authors
이정훈윤대성강지윤김태송
Keywords
cantilever
Issue Date
2005-06
Publisher
International conference on electroceramics 2005
Citation
, 84-85
URI
http://pubs.kist.re.kr/handle/201004/28605
Appears in Collections:
KIST Publication > Conference Paper
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