Annealing effect of Zn-Sn-O films deposited using combinatorial method

Title
Annealing effect of Zn-Sn-O films deposited using combinatorial method
Authors
고지훈김인호김동환이경석박종극이택성백영준정병기김원목
Keywords
Transparent conduction oxide; sputtering; combinatorial; annealing
Issue Date
2004-07
Publisher
한국전기전자재료학회
Citation
VOL 5, NO 2, 998-1001
URI
http://pubs.kist.re.kr/handle/201004/28654
Appears in Collections:
KIST Publication > Conference Paper
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