Lattice distortion of transparent conductive AlGaZnO thin films prepared by RF magnetron sputtering

Title
Lattice distortion of transparent conductive AlGaZnO thin films prepared by RF magnetron sputtering
Authors
김태훈신상훈김인호김원목이전국
Keywords
AlGaZnO; Transparent Conductive Oxide; Co-sputtering; Lattice distortion; electrtical resistivity
Issue Date
2005-06
Publisher
International Conference on Electroceramics
URI
http://pubs.kist.re.kr/handle/201004/28740
Appears in Collections:
KIST Publication > Conference Paper
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