Electrical properties of ZnO:Al2O3 transparent conductive oxide thin film on polymer substrate

Title
Electrical properties of ZnO:Al2O3 transparent conductive oxide thin film on polymer substrate
Authors
신상훈김태훈김진혁이전국
Keywords
ZnO:Al2O3; electrical properties; RF Sputtering; Tansparent Conductive Oxide; Polymer substrate
Issue Date
2005-08
Publisher
제 29회 한국 진공학회 학술 발표회
URI
http://pubs.kist.re.kr/handle/201004/28741
Appears in Collections:
KIST Publication > Conference Paper
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