The actuator for micro moving of a body in a plane

Title
The actuator for micro moving of a body in a plane
Authors
P.VasiljevS. Borodinas윤석진D. MazeikaG. Kulvietis
Keywords
actuator; shaking beam; micro moving
Issue Date
2005-05
Publisher
Materials chemistry and physics
Citation
VOL 91, NO 1, 237-242
URI
http://pubs.kist.re.kr/handle/201004/28827
ISSN
0254-0584
Appears in Collections:
KIST Publication > Article
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