Effect of ZrO2 incorporation into high dielectric Gd2O3 film grown on Si(111)

Title
Effect of ZrO2 incorporation into high dielectric Gd2O3 film grown on Si(111)
Authors
S. A. ParkY. S. RohY. K. KimJ. H. BaeckM. NohK. JeongM.-H. ChoC. H. ChangM. K. Joo김태곤송종한D.-H. Ko
Issue Date
2005-07
Publisher
Journal of applied physics
Citation
VOL 98, NO 2, 024906-1-024906-7
URI
http://pubs.kist.re.kr/handle/201004/28882
ISSN
0021-8979
Appears in Collections:
KIST Publication > Article
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