Bias sputtering and characterization of LiCoO2 thin film cathodes for thin film microbattery

Title
Bias sputtering and characterization of LiCoO2 thin film cathodes for thin film microbattery
Authors
H.Y. ParkS.R. LeeY.J. Lee조병원조원일
Keywords
LiCoO₂; Thin film; Bias sputtering; Microbattery; Thin film battery; Cathode
Issue Date
2005-09
Publisher
Materials chemistry and physics
Citation
VOL 93, NO 1, 70-78
URI
http://pubs.kist.re.kr/handle/201004/28889
ISSN
0254-0584
Appears in Collections:
KIST Publication > Article
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