Fabrication of a Surface Micromachined Uncooled Microbolometer Based on the V2O5/V/V2O5 Sandwich Structure

Title
Fabrication of a Surface Micromachined Uncooled Microbolometer Based on the V2O5/V/V2O5 Sandwich Structure
Authors
한영희최인훈손창식김건태Nguyen Chi Anh신현준문성
Keywords
bolometer; TCR; Vanadium oxide; Multi-layer; Detectivity
Issue Date
2004-12
Publisher
Journal of the Korean Physical Society
Citation
VOL 45, NO 6, 1655-1658
URI
http://pubs.kist.re.kr/handle/201004/28949
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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