Air-gap type film bulk acoustic resonator using flexible thin substrate

Title
Air-gap type film bulk acoustic resonator using flexible thin substrate
Authors
강유리강성철백경갑김용국김수원주병권
Keywords
Ultra thin silicon wafer; Flexible microsystems; Thin FBAR; Resonance characteristics
Issue Date
2005-01
Publisher
Sensors and actuators. A, Physical
Citation
VOL 117, NO 1, 62-70
URI
http://pubs.kist.re.kr/handle/201004/28951
ISSN
0924-4247
Appears in Collections:
KIST Publication > Article
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