Copper Thin films on PET prepared at ambient temperature by ECR-CVD

Title
Copper Thin films on PET prepared at ambient temperature by ECR-CVD
Authors
고형덕진정근변동진이중기박달근
Keywords
Cu(hfac)2; ECR-CVD; poly ethylene terephthalate (PET); Plasma; sheet resistance
Issue Date
2005-12
Publisher
IEEE transactions on components and packaging technologies
Citation
VOL 28, NO 4, 781-784
URI
http://pubs.kist.re.kr/handle/201004/28961
ISSN
1521-3331
Appears in Collections:
KIST Publication > Article
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