Effect of Microstructure of hBN Thin Films on the Nucleation of cBN Phase Deposited by RF UBM Sputtering System

Title
Effect of Microstructure of hBN Thin Films on the Nucleation of cBN Phase Deposited by RF UBM Sputtering System
Authors
이은옥박종극임대순백영준
Keywords
hBN laminate의 정렬도; 압축응력; cBN 핵 형성; cBN; alignment of hBN laminate; compressive stress; cBN nucleation
Issue Date
2004-12
Publisher
한국진공학회지 (Journal of the Korean Vacuum Society)
Citation
VOL 13, NO 4, 150-156
URI
http://pubs.kist.re.kr/handle/201004/28990
Appears in Collections:
KIST Publication > Article
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