Formation of GaAs Nanohole Array using Nanoporous Alumina Mask by Inductively Coupled Plasma Reactive Ion Etching

Title
Formation of GaAs Nanohole Array using Nanoporous Alumina Mask by Inductively Coupled Plasma Reactive Ion Etching
Authors
정미정용우이석변영태전영민김선호모선일우덕하
Keywords
GaAs nanohole; Nanoporous alumina; ICP-RIE
Issue Date
2006-02
Publisher
제 13회 한국반도체학술대회
Citation
, 1125-1126
URI
http://pubs.kist.re.kr/handle/201004/29040
Appears in Collections:
KIST Publication > Conference Paper
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