The effect of direct current bias on the characteristics of Cu/C:H composite thin films on poly ethylene terephthalate film prepared by electron cyclotron resonance-metal organic chemical vapor deposition

Title
The effect of direct current bias on the characteristics of Cu/C:H composite thin films on poly ethylene terephthalate film prepared by electron cyclotron resonance-metal organic chemical vapor deposition
Authors
Bup Ju JeonHyungduk KoJin HyunDongjin Byun이중기
Keywords
CVD; Copper; PET; Surface structure
Issue Date
2006-02
Publisher
Thin solid films
Citation
VOL 496, 395-401
URI
http://pubs.kist.re.kr/handle/201004/29084
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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