Fabrication of Nanoabrasive Grinding Wheels and Their Application to Grinding Silicon Wafers

Title
Fabrication of Nanoabrasive Grinding Wheels and Their Application to Grinding Silicon Wafers
Authors
김태완현상훈김주선이종호이해원
Keywords
nanoabrasive; mechanochemical mixing; grinding wheel; vitrified bond; surface quality
Issue Date
2006-08
Publisher
Key engineering materials
Citation
VOL 317-318, 373-376
URI
http://pubs.kist.re.kr/handle/201004/29170
ISSN
1013-9826
Appears in Collections:
KIST Publication > Article
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