Integration of coplanar (Ba,Sr)TiO3 microwave phase shifters onto Si wafers using TiO2 buffer layers

Title
Integration of coplanar (Ba,Sr)TiO3 microwave phase shifters onto Si wafers using TiO2 buffer layers
Authors
김기병윤태순이종철김현석김호기김일두
Issue Date
2006-03
Publisher
IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Citation
VOL 53, NO 3, 518-524
URI
http://pubs.kist.re.kr/handle/201004/29234
ISSN
0885-3010
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE