A Micro Tribotester for MEMS Elements

Title
A Micro Tribotester for MEMS Elements
Authors
김충현안효석
Keywords
Tribotester; Tribology; MEMS; Friction force
Issue Date
2006-08
Publisher
한국공작기계학회논문집 (Transactions of the Korean Society of Machine Tool Engineers)
Citation
VOL 15, NO 4, 39-43
URI
http://pubs.kist.re.kr/handle/201004/29363
Appears in Collections:
KIST Publication > Article
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