Ultrathin silicon micropackaging for RF MEMS devices

Title
Ultrathin silicon micropackaging for RF MEMS devices
Authors
김용국박윤권김재경김수원주병권
Keywords
ultrathin; micropackaging; mems
Issue Date
2006-09
Publisher
Electrochemical and solid-state letters
Citation
VOL 9, NO 2, G44-G48
URI
http://pubs.kist.re.kr/handle/201004/29479
ISSN
1099-0062
Appears in Collections:
KIST Publication > Article
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