Ion Transmittance of Anodic For Ion Beam Nano-patterning

Title
Ion Transmittance of Anodic For Ion Beam Nano-patterning
Authors
신상원이종한이성구이재용황정남최인훈이관희정원용문현찬김태곤송종한
Keywords
anodic alumina; nano-patterning; ion-beam; transmittance
Issue Date
2006-01
Publisher
한국진공학회지 (Journal of the Korean Vacuum Society)
Citation
VOL 15, NO 1, 97-102
URI
http://pubs.kist.re.kr/handle/201004/29750
ISSN
12258822
Appears in Collections:
KIST Publication > Article
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