Stress evolution and diffusion barrier performance of La0.67Sr0.33MnO3 (LSMO)/WCN/Si structure

Title
Stress evolution and diffusion barrier performance of La0.67Sr0.33MnO3 (LSMO)/WCN/Si structure
Authors
이창우김용태Akihiro Wakahara김희준
Keywords
diffusion barrier; WCN; LSMO
Issue Date
2006-07
Publisher
International Conference on Electrical Engineering (ICEE) 2006
URI
http://pubs.kist.re.kr/handle/201004/29778
Appears in Collections:
KIST Publication > Conference Paper
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