Effects of NH3 pulse plasma on atomic layer deposition of tungsten nitride diffusion barrier

Title
Effects of NH3 pulse plasma on atomic layer deposition of tungsten nitride diffusion barrier
Authors
이창우김용태
Keywords
ALD; WN
Issue Date
2006-05
Publisher
Journal of Vacuum Science and Technology B
Citation
VOL 24, NO 3, 1432-1435
URI
http://pubs.kist.re.kr/handle/201004/29790
ISSN
1071-1023
Appears in Collections:
KIST Publication > Article
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