Patterning of Ge2Sb2Te5 phase change material using UV nano-imprint lithography

Title
Patterning of Ge2Sb2Te5 phase change material using UV nano-imprint lithography
Authors
양기연홍성훈김덕기정병기이헌
Keywords
PRAM; Phase change material; Ge2Sb2Te5; nano-imprint lithography
Issue Date
2006-12
Publisher
Microelectronic engineering
Citation
VOL 84, NO 1, 21-24
URI
http://pubs.kist.re.kr/handle/201004/29856
ISSN
0167-9317
Appears in Collections:
KIST Publication > Article
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