Effect of PECVD Oxides for GOI Fabrication on the Direct Wafer Bonding Strength

Title
Effect of PECVD Oxides for GOI Fabrication on the Direct Wafer Bonding Strength
Authors
변영태김선호
Keywords
GaAs-on-Insulator (GOI); 웨이퍼 직접접합; PECVD 산화막; Wafer Direct Bonding; PECVD Oxide
Issue Date
2006-09
Publisher
새물리
Citation
VOL 53, NO 3, 252-257
URI
http://pubs.kist.re.kr/handle/201004/29893
ISSN
0374-4914
Appears in Collections:
KIST Publication > Article
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