Fabrication of tungsten nano dot by using block copolymer thin film

Title
Fabrication of tungsten nano dot by using block copolymer thin film
Authors
강길범김성일김영환박민철김용태이창우
Keywords
diblock copolymer; copolymer lithography; reactive ion etching; nanotemplate; nano dot
Issue Date
2006-10
Publisher
마이크로전자및패키징학회지 (Journal of Microelectronics and Packaging Society)
Citation
VOL 13, NO 3, 13-17
URI
http://pubs.kist.re.kr/handle/201004/29930
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE