Deposition of nanolayers by means of dense plasma focus

Title
Deposition of nanolayers by means of dense plasma focus
Authors
마리나이바노바카핀스키마렉우레직뎀첸코이전국
Keywords
Dense plasma focus; nano layer; layer deposition; ionization; plasma discharge
Issue Date
2006-10
Publisher
Czechoslovak journal of physics
Citation
VOL 56, B237-B242
URI
http://pubs.kist.re.kr/handle/201004/29963
ISSN
0011-4626
Appears in Collections:
KIST Publication > Article
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