Effect of hydrogen content on characteristics of Cu/C:H films coated on polyethylene terephthalate substrate prepared ECR-MOCVD coupled with a periodic DC bias

Title
Effect of hydrogen content on characteristics of Cu/C:H films coated on polyethylene terephthalate substrate prepared ECR-MOCVD coupled with a periodic DC bias
Authors
이중기Bup Ju JeonSangwha Lee
Keywords
ECR; DC bias; Cu/C:H film; room temperature CVD; PET; EMI (electromagnetic interference)
Issue Date
2006-03
Publisher
Materials science forum
Citation
VOL 510-511, 666-669
URI
http://pubs.kist.re.kr/handle/201004/29967
ISSN
0255-5476
Appears in Collections:
KIST Publication > Article
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