Fabrication and Mechanical Characterization of MEMS Based Vertical Probe Tips for Measurements of Micro Pads

Title
Fabrication and Mechanical Characterization of MEMS Based Vertical Probe Tips for Measurements of Micro Pads
Authors
유재욱김진혁추성일문성욱
Issue Date
2006-10
Publisher
Microprocesses and Nanotechnology 2006
Citation
, 340-341
URI
http://pubs.kist.re.kr/handle/201004/29969
Appears in Collections:
KIST Publication > Conference Paper
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