Fabrication of Size Controlled Nanohole Array on III-V Semiconductor substrate by ICP-RIE using nanoporous alumina mask

Title
Fabrication of Size Controlled Nanohole Array on III-V Semiconductor substrate by ICP-RIE using nanoporous alumina mask
Authors
정미이석변영태전영민김선호모선일우덕하
Keywords
III-V Semiconductor; Nanohole Array; Nanoporous Alumina Mask; ICP-RIE
Issue Date
2006-09
Publisher
IUMRS-ICA-2006
URI
http://pubs.kist.re.kr/handle/201004/30060
Appears in Collections:
KIST Publication > Conference Paper
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