Formation of 30 nm GaAs Nanohole Array by ICP-RIE using Nanoporous Alumina Mask

Title
Formation of 30 nm GaAs Nanohole Array by ICP-RIE using Nanoporous Alumina Mask
Authors
정미변영태전영민이석김선호모선일우덕하
Keywords
GaAs Nanohole Array; ICP-RIE; Nanoporous Alumina Mask
Issue Date
2006-04
Publisher
82회 한국물리학회 학술논문발표
Citation
, 99-99
URI
http://pubs.kist.re.kr/handle/201004/30062
Appears in Collections:
KIST Publication > Conference Paper
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