MEMS Fabrication of Microchannel with Poly-Si Layer for Application to Microchip Electrophoresis

Title
MEMS Fabrication of Microchannel with Poly-Si Layer for Application to Microchip Electrophoresis
Authors
김태하김다영전명석이상순
Keywords
MEMS Fabrication; Microchip Electrophoresis; Quartz; Glass; Poly-Silicon; Etching
Issue Date
2006-10
Publisher
Korean Chemical Engineering Research
Citation
VOL 44, NO 5, 513-519
URI
http://pubs.kist.re.kr/handle/201004/30099
Appears in Collections:
KIST Publication > Article
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