Resonant characteristic of the PZT thin film microcantilever with mass sensitivity of femto-gram level for biomolecule detection

Title
Resonant characteristic of the PZT thin film microcantilever with mass sensitivity of femto-gram level for biomolecule detection
Authors
천동원황교선이정훈엄길호차병학이우영윤대성김태송
Issue Date
2006-04
Publisher
Korea MEMS Conference
URI
http://pubs.kist.re.kr/handle/201004/30111
Appears in Collections:
KIST Publication > Conference Paper
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