Investigation on the enhanced switching reliability of a non-volatile phase-change memory device with an oxidized TiN electrode

Title
Investigation on the enhanced switching reliability of a non-volatile phase-change memory device with an oxidized TiN electrode
Authors
강대환김인호정증현정병기안동호이동복김현미김기범
Keywords
phase change memory; switching reliability; oxidized TiN; TiN electrode
Issue Date
2006-04
Publisher
MRS 2006 spring meeting
URI
http://pubs.kist.re.kr/handle/201004/30154
Appears in Collections:
KIST Publication > Conference Paper
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