Fabrication of 3D thin polymer structures for hybrid sensors and actuators

Title
Fabrication of 3D thin polymer structures for hybrid sensors and actuators
Authors
Jungyul Park김진석노덕문박석호김병규전국진
Issue Date
2006-01
Publisher
19th IEEE International Conference on Micro Electro Mechanical Systems
Citation
, 310-313
URI
http://pubs.kist.re.kr/handle/201004/30248
Appears in Collections:
KIST Publication > Conference Paper
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