Electron-beam lithography of Co/Pd multilayer with hydrogen silsesquioxane and amorphous Si intermediate layer

Title
Electron-beam lithography of Co/Pd multilayer with hydrogen silsesquioxane and amorphous Si intermediate layer
Authors
위정섭이태연진경배홍대훈신경호김기범
Keywords
E-beam lithography; Co/Pd multilayer; HSQ
Issue Date
2006-11
Publisher
Journal of Vacuum Science and Technology B
Citation
VOL 24, NO 6, 2616-2620
URI
http://pubs.kist.re.kr/handle/201004/30381
ISSN
1071-1023
Appears in Collections:
KIST Publication > Article
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