Fabrication of microcantilever sensors actuated by piezoelectric Pb(Zr0.52Ti0.48)O3 thick films and determination of their electromechanical characteristics

Title
Fabrication of microcantilever sensors actuated by piezoelectric Pb(Zr0.52Ti0.48)O3 thick films and determination of their electromechanical characteristics
Authors
박재홍권태윤윤대성김환김태송
Keywords
압전후막; 캔틸레버; 공진특성
Issue Date
2005-12
Publisher
Advanced functional materials
Citation
VOL 15, NO 12, 2021-2028
URI
http://pubs.kist.re.kr/handle/201004/30627
ISSN
1616-301X
Appears in Collections:
KIST Publication > Article
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