Ultra-High Sensitive PZT Thin Film Cantilever for Femtogram Mass Detection

Title
Ultra-High Sensitive PZT Thin Film Cantilever for Femtogram Mass Detection
Authors
천동원황교선이정훈윤대성이우영김태송
Keywords
질량검출; 캔틸레버; PZT
Issue Date
2006-04
Publisher
ISIF 2006
URI
http://pubs.kist.re.kr/handle/201004/30633
Appears in Collections:
KIST Publication > Conference Paper
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