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dc.contributor.author천동원-
dc.contributor.author황교선-
dc.contributor.author이정훈-
dc.contributor.author윤대성-
dc.contributor.author이우영-
dc.contributor.author김태송-
dc.date.accessioned2015-12-02T14:36:45Z-
dc.date.available2015-12-02T14:36:45Z-
dc.date.issued200604-
dc.identifier.other24700-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/30633-
dc.publisherISIF 2006-
dc.subject질량검출-
dc.subject캔틸레버-
dc.subjectPZT-
dc.titleUltra-High Sensitive PZT Thin Film Cantilever for Femtogram Mass Detection-
dc.typeConference Paper-
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KIST Publication > Conference Paper
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