Direct-Patterned PZT Microcantilever Using Photosensitive Sol-Gel Method

Title
Direct-Patterned PZT Microcantilever Using Photosensitive Sol-Gel Method
Authors
강기윤박형호윤대성김태송
Keywords
캔틸레버; 솔젤; PZT
Issue Date
2006-04
Publisher
ISIF 2006
URI
http://pubs.kist.re.kr/handle/201004/30634
Appears in Collections:
KIST Publication > Conference Paper
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