Effect of the porosity of PZT thick films on mass sensitivity and resonance force for cantilever type bio sensors

Title
Effect of the porosity of PZT thick films on mass sensitivity and resonance force for cantilever type bio sensors
Authors
박재홍권태윤윤대성김태송김환
Issue Date
2006-10
Publisher
IEEE Sensors 2006
URI
http://pubs.kist.re.kr/handle/201004/30642
Appears in Collections:
KIST Publication > Conference Paper
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