Wafer bonding between InP and Ce:YIG(CeY2Fe5O12) using O2 plasma surface activation for an integrated optical waveguide isolator

Title
Wafer bonding between InP and Ce:YIG(CeY2Fe5O12) using O2 plasma surface activation for an integrated optical waveguide isolator
Authors
노종욱양정수옥성해우덕하변영태전영민T. Mizumoto이우영이석
Keywords
Wafer bonding; integrated optical waveguide isolator; O2 plasma surface activation; GGG; Ce:YIG; photonic integrated circuits
Issue Date
2006-01
Publisher
PW2006 Photonics West
Citation
VOL 6123-44, 612316-1-612316-8
URI
http://pubs.kist.re.kr/handle/201004/30695
Appears in Collections:
KIST Publication > Conference Paper
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