O2 plasma assisted low temperature hydrophilic bonding of inP and GGG(Gd3Ga5O12) for optoelectronic integrated devices

Title
O2 plasma assisted low temperature hydrophilic bonding of inP and GGG(Gd3Ga5O12) for optoelectronic integrated devices
Authors
노종욱양정수우덕하변영태전영민T. Mizumoto이우영이석
Issue Date
2006-09
Publisher
IUMRS-ICA2006
Citation
VOL 8-P-18, 132-132
URI
http://pubs.kist.re.kr/handle/201004/30697
Appears in Collections:
KIST Publication > Conference Paper
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