Fabrication and Mechanical Characterization of Micro Electro Mechanical System Based Vertical Probe Tips for Micro Pad Measurements

Title
Fabrication and Mechanical Characterization of Micro Electro Mechanical System Based Vertical Probe Tips for Micro Pad Measurements
Authors
유재욱김진혁추성일이승훈문성욱
Keywords
vertical probe tip; MEMS probe card; bulk-micromachining; electro-plating; compression test
Issue Date
2006-12
Publisher
Japanese Journal of Applied Physics, Part 1- Regular Papers
Citation
VOL 45, NO 12, 9238-9243
URI
http://pubs.kist.re.kr/handle/201004/30737
ISSN
0021-4922
Appears in Collections:
KIST Publication > Article
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