Thermally sprayed Al2O3 and Y2O3 coatings for corrosion protection in reactive ion etching

Title
Thermally sprayed Al2O3 and Y2O3 coatings for corrosion protection in reactive ion etching
Authors
백경호이영라석현광
Keywords
thermal spray; corrosion; reactive ion etching
Issue Date
2006-10
Publisher
Asian Thermal Spray Conference 2006
Citation
, 78-79
URI
http://pubs.kist.re.kr/handle/201004/30817
Appears in Collections:
KIST Publication > Conference Paper
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