A micromachined reaction force actuator (RFA) for a nanomanipulator preparation

Title
A micromachined reaction force actuator (RFA) for a nanomanipulator preparation
Authors
Il-Han Hwang윤의성Jong-Hyun Lee
Keywords
Interferometer; microelectromechanical systems (MEMS); microactuator; nanostep; reaction force
Issue Date
2006-06
Publisher
Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems
Citation
VOL 15, NO 3, 492-497
URI
http://pubs.kist.re.kr/handle/201004/30819
ISSN
1057-7157
Appears in Collections:
KIST Publication > Article
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