Theoretical calculation of resonance force and mass sensitivity of PZT thick film cantilever with respect to thick film porosity

Title
Theoretical calculation of resonance force and mass sensitivity of PZT thick film cantilever with respect to thick film porosity
Authors
박재홍권태윤김태송김환윤대성
Keywords
압전후막; 스크린프린팅; 강유전특성
Issue Date
2006-04
Publisher
ISIF 2006
URI
http://pubs.kist.re.kr/handle/201004/30820
Appears in Collections:
KIST Publication > Conference Paper
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