Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film

Title
Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film
Authors
박재홍권태윤김형준김승래윤대성천체일김환김태송
Keywords
Cantilever; Resonance; sensitivity; PZT; thick film
Issue Date
2006-12
Publisher
Journal of electroceramics
Citation
VOL 17, NO 2-4, 565-572
URI
http://pubs.kist.re.kr/handle/201004/30821
ISSN
1385-3449
Appears in Collections:
KIST Publication > Article
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