A new capacitive displacement sensor with high accuracy and long-range

Title
A new capacitive displacement sensor with high accuracy and long-range
Authors
Moojin KimWonkyu Moon윤의성이광렬
Keywords
Encoder; Capacitive displacement sensor; DLC; Contact-type; High resolution
Issue Date
2006-08
Publisher
Sensors and actuators. A, Physical
Citation
VOL 130-131, 135-141
URI
http://pubs.kist.re.kr/handle/201004/30822
ISSN
0924-4247
Appears in Collections:
KIST Publication > Article
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