Low frequency and microwave performances of Ba0.6Sr0.4TiO3 films on atomic layer deposited TiO2/high resistivity Si substrates

Title
Low frequency and microwave performances of Ba0.6Sr0.4TiO3 films on atomic layer deposited TiO2/high resistivity Si substrates
Authors
김현석김일두김기병윤태순이종철Harry L. Tuller최원열김호기
Keywords
BST; Buffer layer; Coplanar waveguide; Phase shifter
Issue Date
2006-12
Publisher
Journal of electroceramics
Citation
VOL 17, 421-425
URI
http://pubs.kist.re.kr/handle/201004/30923
ISSN
1385-3449
Appears in Collections:
KIST Publication > Article
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