Floating gated silicon-on-insulator nonvolatile memory devices with Au nanoparticles embedded in SiO1.3N insulators by digital sputtering method

Title
Floating gated silicon-on-insulator nonvolatile memory devices with Au nanoparticles embedded in SiO1.3N insulators by digital sputtering method
Authors
이동욱이민승김재훈김은규구현모조원주김원목
Keywords
nanoparticle; floating gate; nonvolatile memory
Issue Date
2007-03
Publisher
Applied physics letters
Citation
VOL 90, NO 9, 093514-1-093514-3
URI
http://pubs.kist.re.kr/handle/201004/30999
ISSN
0003-6951
Appears in Collections:
KIST Publication > Article
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