Large area 3D nanoscale metal etching process

Title
Large area 3D nanoscale metal etching process
Authors
김무현이병철제가타김상경신현준김정식문성욱
Keywords
무전해도금; 선택적 습식식각; 나노에칭 공정; MEMS; NEMS; electroless plating; selective wet etching; etching process
Issue Date
2007-04
Publisher
제 9회 한국 MEMS 학술대회 논문집(2007년 4월 5-7일)
Citation
, 642-645
URI
http://pubs.kist.re.kr/handle/201004/31034
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE