FABRICATION AND CHARACTERISTICS OF MEMS VERTICAL TYPE PROBE TIP FOR MICRO SIZED PADS MEASUREMENT

Title
FABRICATION AND CHARACTERISTICS OF MEMS VERTICAL TYPE PROBE TIP FOR MICRO SIZED PADS MEASUREMENT
Authors
김진혁추성일서호원유재욱김규태문성욱
Issue Date
2007-01
Publisher
IEEE MEMS 2007
Citation
, 283-286
URI
http://pubs.kist.re.kr/handle/201004/31052
Appears in Collections:
KIST Publication > Conference Paper
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